Issued Patents 2022
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11495476 | Substrate treating apparatus | Koji Nishi, Yukihiko Inagaki, Ryuichi Yoshida | 2022-11-08 |
| 11387121 | Substrate treating apparatus and substrate treating system including pin lift mechanism below cooling base and heat plate | Yasuhiro Fukumoto, Yasuhiro Shiba | 2022-07-12 |