Issued Patents 2022
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11466206 | Silicon etching solution and method for producing silicon device using the etching solution | Yoshiki SEIKE, Seiji Tono, Kenji Kobayashi | 2022-10-11 |
| 11439967 | Chemical liquid preparation method, chemical liquid preparation device, and substrate processing device | Hajime NISHIDE, Takashi Izuta, Takatoshi Hayashi, Katsuhiro Fukui, Koichi Okamoto +4 more | 2022-09-13 |
| 11222795 | Substrate processing method and substrate processing apparatus | Kenji Kobayashi | 2022-01-11 |