Issued Patents 2022
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11404629 | Treating solution supply apparatus | Junki Nishimura, Hiroyuki Ogura, Toru Momma, Shoji Kirita, Hidetoshi Sagawa +1 more | 2022-08-02 |
| 11358076 | Filter coupling device and substrate treating apparatus provided therewith | Toshiya Kuwahara | 2022-06-14 |