Issued Patents 2022
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11410863 | Substrate processing device including heater between substrate and spin base | Motoyuki Shimai, Toyohide Hayashi | 2022-08-09 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11410863 | Substrate processing device including heater between substrate and spin base | Motoyuki Shimai, Toyohide Hayashi | 2022-08-09 |