Issued Patents 2022
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11512162 | Polymer, organic layer composition and method of forming patterns | Sunghwan Kim, Hyeonil JUNG | 2022-11-29 |
| 11409197 | Hardmask composition, hardmask layer and method of forming patterns | Jaebum LIM, Sunghwan Kim, Seunghyun Kim, Taeho Kim, Sunyoung YANG | 2022-08-09 |
| 11409198 | Hardmask composition, hardmask layer and method of forming patterns | Seunghyun Kim, Hyungseok Park, Sunghwan Kim, Hyeonil JUNG | 2022-08-09 |
| 11214678 | Hardmask composition, hardmask layer and method of forming patterns | Jaebum LIM, Sunyoung YANG, Sunghwan Kim, Seunghyun Kim | 2022-01-04 |