Issued Patents 2022
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11289308 | Apparatus and method for processing substrate and method of manufacturing semiconductor device using the method | Sangjin An, Minseop PARK, Chanyeong Jeong, Yeongkwang Lee | 2022-03-29 |