Issued Patents 2022
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11450540 | Apparatus and method for treating substrate | Donghyuk SEO | 2022-09-20 |
| 11373887 | Heat treatment method of substrate and apparatus thereof | Sang Bok HAN, Dong Hyuk SEO, Bong Kuk KIM | 2022-06-28 |
| 11295952 | Apparatus for treating substrate and method for treating apparatus | Tae Sub LEE, Gyu Hyun Kim, Donghyuk SEO, Seo Jung PARK | 2022-04-05 |