Issued Patents 2022
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11389922 | Polishing measurement device and abrasion time controlling method thereof, and polishing control system including same | Kee Yun Han | 2022-07-19 |
| 11371829 | Wafer carrier thickness measuring device | — | 2022-06-28 |