Issued Patents 2022
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11469130 | Substrate processing apparatus and rotating electrical connector for vacuum | Ho Bin YOON, Jin-Hyuk Yoo | 2022-10-11 |
| 11361984 | Substrate processing apparatus | Jin-Hyuk Yoo, Min Su Lee, Dong Hwan Choi | 2022-06-14 |