Issued Patents 2022
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11402746 | Mask protective module, pellicle having the same, and lithography apparatus having the same | Jinho AHN, Jung-Hwan Kim | 2022-08-02 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11402746 | Mask protective module, pellicle having the same, and lithography apparatus having the same | Jinho AHN, Jung-Hwan Kim | 2022-08-02 |