Issued Patents 2022
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11456195 | Wafer processing apparatus and wafer processing method using the same apparatus | Youngho HWANG, Sungyong Park, Eunseok SEO, Hyeongseok Jo | 2022-09-27 |
| 11315817 | Apparatus for transferring wafer, method for transferring wafer using the same with three sensors | Euijin Kim, Hyungjong Kim, Juno Park | 2022-04-26 |