Issued Patents 2022
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11518909 | Composition for forming silica layer, manufacturing method for silica layer, and silica layer | Kunbae Noh, Taeksoo KWAK, Junyoung Jang, Yoonyoung Koo, Yonggoog Kim +8 more | 2022-12-06 |
| 11493848 | Resist underlayer composition, and method of forming patterns using the composition | Soonhyung Kwon, Shinhyo BAE, Hyeon PARK, Jaeyeol BAEK, Beomjun JOO +1 more | 2022-11-08 |
| 11254871 | Etching composition for silicon nitride layer and method of etching silicon nitride layer using the same | Jung Min Choi, Jun-Young Jang, Hyun Jung Kim, Hyung Rang Moon, Ji-Hye Lee +1 more | 2022-02-22 |