Issued Patents 2022
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11254871 | Etching composition for silicon nitride layer and method of etching silicon nitride layer using the same | Jung Min Choi, Jun-Young Jang, Hyun Jung Kim, Hyung Rang Moon, Ji-Hye Lee +1 more | 2022-02-22 |