Issued Patents 2022
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11341842 | Metering data management system and computer readable recording medium | Yong Jae Joo, Jae Koo Noh | 2022-05-24 |
| 11222786 | Method of manufacture including polishing pad monitoring method and polishing apparatus including polishing pad monitoring device | Woo-Mok Son, Nam Hoon Lee, Dong-Eog Kim, Seung-Hun Oh, Eun-Seok Lee +1 more | 2022-01-11 |