Issued Patents 2022
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11531277 | Extreme ultraviolet (EUV) mask inspection system, a load-lock chamber included therein, and a method for inspecting an EUV mask using the EUV mask inspection system | Sungho Kang, Jaewhan Sung, Hak-Seok Lee, Hyunjune Cho | 2022-12-20 |