Issued Patents 2022
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11353413 | Mask inspection apparatuses and methods, and methods of fabricating masks including mask inspection methods | In-Yong Kang, Il-Yong Jang | 2022-06-07 |
| 11354798 | Inspection apparatus for detecting defects in photomasks and dies | Kang-Won Lee, Cheol Ki Min, Jong Ju Park | 2022-06-07 |