Issued Patents 2022
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11427906 | Chamber cleaning device and chamber cleaning method | Dong Hwan Lee, Jae-Ho Kim, Hyun I. Kim, Jae Wan Lee, Byung Gwan LIM | 2022-08-30 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11427906 | Chamber cleaning device and chamber cleaning method | Dong Hwan Lee, Jae-Ho Kim, Hyun I. Kim, Jae Wan Lee, Byung Gwan LIM | 2022-08-30 |