Issued Patents 2022
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11339473 | Apparatus for atomic layer deposition and method of forming thin film using the apparatus | Sang Yub Ie, Jung-Geun Jee | 2022-05-24 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11339473 | Apparatus for atomic layer deposition and method of forming thin film using the apparatus | Sang Yub Ie, Jung-Geun Jee | 2022-05-24 |