Issued Patents 2022
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11328903 | Plasma processing system, method of controlling plasma in the plasma processing system, and method of manufacturing semiconductor device by using the method of controlling the plasma | Jaewon Jeong, Juho Lee, Junghyun Cho | 2022-05-10 |