Issued Patents 2022
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11400495 | Automated particle removal system having angular adjustability | Keng Yew SONG, Chin Tiong Ong, Soo Kin (Kenny) Tan, Qing Le Tan | 2022-08-02 |
| 11380517 | System and method for spatially resolved optical metrology of an ion beam | Glen Gilchrist, Shurong Liang | 2022-07-05 |