Issued Patents 2022
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11352691 | Method and device for locating the origin of a defect affecting a stack of thin layers deposited on a substrate | Yohan Faucillon, Gregoire Mathey, Thierry KAUFFMANN | 2022-06-07 |