Issued Patents 2022
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11505455 | Method for producing a micromechanical device having a damper structure | Holger Hoefer, Klaus Offterdinger, Maximilian Amberger | 2022-11-22 |
| 11472698 | Method for producing damper structures on a micromechanical wafer | Stefan Apelt | 2022-10-18 |