Issued Patents 2022
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11531041 | Sensor system, including a plurality of individual and separate sensor elements | Amin Jemili, Joerg Braeuer | 2022-12-20 |
| 11274038 | Method for setting a pressure in a cavern formed with the aid of a substrate and of a substrate cap, semiconductor system, in particular, wafer system | — | 2022-03-15 |
| 11215632 | Micromechanical inertial sensor | Lars Tebje | 2022-01-04 |