Issued Patents 2022
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11261082 | Micromechanical device and method for manufacturing a micromechanical device | Eckhard Graf, Holger Rumpf, Jens Frey, Kurt-Ulrich Ritzau, Achim Breitling | 2022-03-01 |
| 11214482 | Micromechanical device including a covering bond frame | Martin Rambach | 2022-01-04 |