Issued Patents 2022
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11393664 | Substrate placing table, plasma processing apparatus provided with same, and plasma processing method | — | 2022-07-19 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11393664 | Substrate placing table, plasma processing apparatus provided with same, and plasma processing method | — | 2022-07-19 |