Issued Patents 2022
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11488865 | Method and apparatus for plasma dicing a semi-conductor wafer | David Pays-Volard, Chris Johnson, David Johnson, Russell Westerman, Gordon M. Grivna | 2022-11-01 |
| 11315757 | Method and apparatus to enhance sheath formation, evolution and pulse to pulse stability in RF powered plasma applications | Jonathan Smyka, Scott C. White, Aaron Michael Burry | 2022-04-26 |