Issued Patents 2022
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11430630 | Charged particle beam apparatus | Tsunenori Nomaguchi, Chisato Kamiya, Junichi Katane | 2022-08-30 |
| 11431579 | Anomaly detection device, anomaly detection system, and control method | Takamitsu Sasaki | 2022-08-30 |
| 11391756 | Probe module and probe | Takayuki Mizuno, Tomohisa Ohtaki, Toru Fujimura, Shigehiko Kato, Yasuhiko Nara +3 more | 2022-07-19 |