Issued Patents 2022
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11280381 | Active damper for semiconductor metrology and inspection systems | Paul Doyle, Morgan A. Crouch, Kenneth E. James | 2022-03-22 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11280381 | Active damper for semiconductor metrology and inspection systems | Paul Doyle, Morgan A. Crouch, Kenneth E. James | 2022-03-22 |