Issued Patents 2022
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11355302 | Multi-beam blanking device and multi-charged-particle-beam writing apparatus | Hiroshi Yamashita, Hirofumi Morita, Hiroshi Matsumoto | 2022-06-07 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11355302 | Multi-beam blanking device and multi-charged-particle-beam writing apparatus | Hiroshi Yamashita, Hirofumi Morita, Hiroshi Matsumoto | 2022-06-07 |