Issued Patents 2022
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11456153 | Charged particle beam writing method and charged particle beam writing apparatus | — | 2022-09-27 |
| 11443918 | Charged particle beam writing method and charged particle beam writing apparatus | Yasuo Kato | 2022-09-13 |
| 11327408 | Writing data generating method and multi charged particle beam writing apparatus | Noriaki Nakayamada | 2022-05-10 |