Issued Patents 2022
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11300948 | Process control of semiconductor fabrication based on spectra quality metrics | Taher Kagalwala, Alok Vaid, Matthew Sendelbach, Paul ISBESTER, Yoav Etzioni | 2022-04-12 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11300948 | Process control of semiconductor fabrication based on spectra quality metrics | Taher Kagalwala, Alok Vaid, Matthew Sendelbach, Paul ISBESTER, Yoav Etzioni | 2022-04-12 |