Issued Patents 2022
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11533567 | Method of making a piezoelectric MEMS microphone | Guofeng Chen | 2022-12-20 |
| 11350219 | Piezoelectric MEMS microphone | Guofeng Chen | 2022-05-31 |
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11533567 | Method of making a piezoelectric MEMS microphone | Guofeng Chen | 2022-12-20 |
| 11350219 | Piezoelectric MEMS microphone | Guofeng Chen | 2022-05-31 |