Issued Patents 2022
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11417752 | Method for producing thin film transistor | Daisuke Matsuo, Yoshitaka Setoguchi, Shigeaki Kishida | 2022-08-16 |
| 11251020 | Sputtering apparatus | Shigeaki Kishida, Daisuke Matsuo, Yoshitaka Setoguchi | 2022-02-15 |
| 11217429 | Plasma processing device | — | 2022-01-04 |