Issued Patents 2022
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11381196 | Stage driving apparatus, lithography apparatus, and method of manufacturing article | — | 2022-07-05 |
TM
Takayasu Matsui
Overall (2022): #240,056 of 548,613Top 45%
1
Patents 2022