Issued Patents 2022
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11372333 | Target supply device, extreme ultraviolet light generation apparatus, and electronic device manufacturing method | — | 2022-06-28 |
| 11266001 | Target supply device, extreme ultraviolet light generation apparatus, and electronic device manufacturing method | — | 2022-03-01 |
| 11250976 | Rare earth thin film magnet, process for producing same, and target for forming rare earth thin film magnet | Hirotoshi Fukunaga, Takeshi Yanai, Masaru Itakura, Hironobu Sawatari | 2022-02-15 |