Issued Patents 2022
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11520242 | Exposure apparatus, manufacturing method of flat-panel display, device manufacturing method, and exposure method | — | 2022-12-06 |
| 11402762 | Movable body apparatus, moving method, exposure apparatus, exposure method, flat-panel display manufacturing method, and device manufacturing method | — | 2022-08-02 |