Issued Patents 2022
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11467501 | Image-forming optical system, exposure apparatus, and device producing method | — | 2022-10-11 |
| 11353795 | Light source apparatus, optical apparatus, exposure apparatus, device manufacturing method, illuminating method, exposure method, and method for manufacturing optical apparatus | Yoshio Kawabe | 2022-06-07 |