Issued Patents 2022
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11412607 | Atomic beam generator, bonding apparatus, surface modification method, and bonding method | Seiichi Hata, Junpei Sakurai, Yuuki Hirai, Hiroyuki Tsuji, Takayoshi Akao +1 more | 2022-08-09 |