Issued Patents 2022
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11519094 | Apparatus and method for etching one side of a semiconductor layer of a workpiece | Stefan Reber, Kai Schillinger, Benjamin Reichhart | 2022-12-06 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11519094 | Apparatus and method for etching one side of a semiconductor layer of a workpiece | Stefan Reber, Kai Schillinger, Benjamin Reichhart | 2022-12-06 |