Issued Patents 2022
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11515118 | Electron beam irradiation apparatus and electron beam alignment method | Kenji Watanabe, Ryo Tajima, Tsutomu Karimata | 2022-11-29 |
| 11322335 | Charged particle multi-beam device | — | 2022-05-03 |