SO

Shinichi Okada

EB Ebara: 2 patents #30 of 158Top 20%
Overall (2022): #111,270 of 548,613Top 25%
2
Patents 2022

Issued Patents 2022

Showing 1–2 of 2 patents

Patent #TitleCo-InventorsDate
11515118 Electron beam irradiation apparatus and electron beam alignment method Kenji Watanabe, Ryo Tajima, Tsutomu Karimata 2022-11-29
11322335 Charged particle multi-beam device 2022-05-03