Issued Patents 2022
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11526000 | Two-axis MEMS mirror with separated drives | Matti LIUKKU, Altti Torkkeli | 2022-12-13 |
| 11467181 | Low-noise multi-axis MEMS accelerometer | Matti LIUKKU, Ville-Pekka RYTKÖNEN | 2022-10-11 |
| 11415416 | Vibration-robust multiaxis gyroscope | Heikki Kuisma, Ville-Pekka RYTKÖNEN | 2022-08-16 |
| 11377346 | Low-noise multi axis MEMS accelerometer | Hannu VESTERINEN, Ville-Pekka RYTKÖNEN | 2022-07-05 |
| 11320265 | Offset-cancelling capacitive MEMS gyroscope | Lasse AALTONEN | 2022-05-03 |