Issued Patents 2022
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11295976 | Substrate support device, substrate conveyance robot, and aligner device | Joseph Chang, Nobuyuki Furukawa, Yong Gu Kang | 2022-04-05 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11295976 | Substrate support device, substrate conveyance robot, and aligner device | Joseph Chang, Nobuyuki Furukawa, Yong Gu Kang | 2022-04-05 |