Issued Patents 2022
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11422460 | Alignment control in nanoimprint lithography using feedback and feedforward control | Mingji Lou, Takahiro Yoshida, Steven T. Jenkins, Byung-Jin Choi | 2022-08-23 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11422460 | Alignment control in nanoimprint lithography using feedback and feedforward control | Mingji Lou, Takahiro Yoshida, Steven T. Jenkins, Byung-Jin Choi | 2022-08-23 |