Issued Patents 2022
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11462421 | Apparatus for collecting by-product of semiconductor manufacturing process | Yeon Ju Lee, Ji Su Kim | 2022-10-04 |
| 11462422 | Apparatus having cooling line for collecting by-product in semiconductor manufacturing process | Yeon Ju Lee, Myung Pil Han | 2022-10-04 |