Issued Patents 2022
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11520240 | Wafer alignment markers, systems, and related methods | Nikolay A. Mirin, Robert Dembi, Richard T. Housley, Jonathan D. Harms, Stephen J. Kramer | 2022-12-06 |
| 11251096 | Wafer registration and overlay measurement systems and related methods | Nikolay A. Mirin, Robert Dembi, Richard T. Housley, Jonathan D. Harms, Stephen J. Kramer | 2022-02-15 |