Issued Patents 2022
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11450805 | Compound, semiconductor material, and methods for manufacturing coating and semiconductor using the same | Shigemasa Nakasugi, Hiroshi Yanagita, Kazunori Kurosawa, Yusuke Hama, Yuriko Matsuura | 2022-09-20 |
| 11366389 | Allyloxy derivative, resist underlayer forming composition using the same, and method of manufacturing resist underlayer and semiconductor device using the same | Shigemasa Nakasugi, Hiroshi Yanagita, Yusuke Hama, Yuriko Matsuura | 2022-06-21 |