Issued Patents 2022
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11319513 | Non-aqueous tungsten compatible metal nitride selective etchants and cleaners | Chun-Yi Chiu, Chu-Hung Wade Wei, Mi Yeon Oh | 2022-05-03 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11319513 | Non-aqueous tungsten compatible metal nitride selective etchants and cleaners | Chun-Yi Chiu, Chu-Hung Wade Wei, Mi Yeon Oh | 2022-05-03 |