Issued Patents 2022
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11380567 | Wafer purging-type shelf assembly and buffer module having the same | June Phil Yoon | 2022-07-05 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11380567 | Wafer purging-type shelf assembly and buffer module having the same | June Phil Yoon | 2022-07-05 |