Issued Patents 2022
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11456154 | Plasma-generating unit and substrate treatment apparatus including the same | Seung Jin Park, Hyoseong Seong, Doo Ho Lim | 2022-09-27 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11456154 | Plasma-generating unit and substrate treatment apparatus including the same | Seung Jin Park, Hyoseong Seong, Doo Ho Lim | 2022-09-27 |