Issued Patents 2022
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11429409 | Software emulator for hardware components in a gas delivery system of substrate processing system | Bostjan Pust, Chung-Ho Huang | 2022-08-30 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11429409 | Software emulator for hardware components in a gas delivery system of substrate processing system | Bostjan Pust, Chung-Ho Huang | 2022-08-30 |